At EuMW 2021, Steve Dudkiewicz, Vice President, Marketing & Business Development, demonstrated Maury's latest automated impedance tuner, the Nano5G.
The Nano5G is the industry's smallest automated impedance tuner and has been designed for on-wafer measurements, integrated on any commercial probe station with direct connection to the probe tip. The direct connection ensures the highest tuning range at the DUT reference plane is achieved, and phase skew is minimized to promote accurate EVM and ACPR measurements.
While the EuMW 2021 was not on-wafer due to table constraints, it is easy to understand how the tuner would look on-wafer thanks to FormFactor's modular integration, shown in the video.